LSPL GROUP
LASER SURFACE PROCESSING LABORATORY

Facilities at the LSPL
  • 1 kW CO2 laser
  • 10 W KrF excimer laser
  • Laser-CVD reactor
  • PLD reactor
  • Vacuum and inert atmosphere annealing furnaces
  • X-ray diffractometer (Bragg-Brentano and glancing incidence)
  • Optical emission spectrometer
  • Quadrupole mass spectrometer
  • Optical profilometer
  • Optical microscope

  • Other accessible facilities
  • SEM/EDS
  • TEM
  • AFM
  • Micro-Raman spectrometer
  • Auger/XPS spectrometer
  • Two-wavelength ellipsometer